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Sputtering is a physical process whereby atoms in a solid target material are ejected into the gas phase due to bombardment of the material by energetic ions. It is commonly used for thin-film deposition, as well as analytical techniques (see below).
Sputtering is largely driven by momentum exchange between the ions and atoms in the material, due to collisions. The process can be thought of as atomic billiards, with the ion (cue ball) striking a large cluster of close-packed atoms (billiard balls). Although the first collision pushes atoms deeper into the cluster, subsequent collisions between the atoms can result in some of the atoms near the surface being ejected away from the cluster. The number of atoms ejected from the surface per incident ion is called the sputter yield and is an important measure of the efficiency of the sputtering process. Other things the sputter yield depends on are the energy of the incident ions, the masses of the ions and target atoms, and the binding energy of atoms in the solid.
The ions for the sputtering process are supplied by a plasma that is induced in the sputtering equipment. In practice a variety of techniques are used to modify the plasma properties, especially ion density, to achieve the optimum sputtering conditions, including usage of RF (radio frequency) alternating current, utilization of magnetic fields, and application of a bias voltage to the target.
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SonyaJMills (Sonya J Mills) Thu, 17 Dec 2009 03:29:29 -0000
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Academy Precision Materials - Offers a broad line of sputtering targets for the following applications: architectural glass, optical filters, magnetic media, resistance layers, and hard and decorative coatings.
Meta Description: [ APM is your one-stop supplier for sputtering targets ]
High Purity Alloys - Manufacturer of sputtering targets, evaporation materials, and specialty alloys for industrial research and development.
Meta Description: [ ACI Alloys, Inc. Our sputtering targets, evaporation material, e-beam sources, and R&D materials are arc-melted or hot-pressed from pure elements., ]
Intevac, Inc. - Supplies static sputtering systems used to manufacture thin film disks for computer hard disk drives. (Nasdaq: IVAC).
Meta Description: [ Intevac is a market leader in magnetic media deposition equipment and develops low-light electro-optical sensors, cameras and imaging systems. ]
Kamis Incorporated - Manufacturer of sputtering and evaporation material for the thin filmcoating industry.
Meta Description: [ Kamis Inc. is a manufacturer of sputtering targets and evaporation material for the thin filmcoating industry. Kamis stocks a large variety of crucibles, evaporation boats, pure metals. ]
Koral Labs, Inc. - Provide thin film sputtering services .
Meta Description: [ Thin film sputtering and evaporation, vacuum heat treating and brazing, sputter deposition of thin films ]
Sputtering Materials, Inc. - Provide high sputtering target bonding services for the thin films industry as well as all applications of physical vapor deposition.
Target Materials - Manufacturer of high performance thin film materials providing a vast array of metal, alloys, and ceramics for sputtering targets, evaporation sources and other PVD materials.
Meta Description: [ Offering thin film deposition materials (sputtering targets and evaporation materials); backing plates, bonding services, single crystal substrates, superconductive materials, and custom ceramic powders. ]
TKC Consulting - Provide sputtering targets, evaporation materials and evaporation sources in standard materials and purities or custom compositions .
Meta Description: [ 25 years experience backs an extrodinarily complete line of thin film materials and equipment. TCK provides all types of sputtering and evaporation equipment and supplies. ]
United Vacuum Materials Corp. - Ultra-high purity materials manufacturing. Powder metallurgy, sputtering targets, and evaporation materials.
